{"id":68,"date":"2002-11-07T13:44:18","date_gmt":"2002-11-07T13:44:18","guid":{"rendered":"http:\/\/localhost\/wordpress\/?p=68"},"modified":"2012-10-23T15:53:30","modified_gmt":"2012-10-23T15:53:30","slug":"new-mems-technology-on-the-way","status":"publish","type":"post","link":"https:\/\/www.noiseboard.com\/?p=68","title":{"rendered":"New MEMS technology on the way"},"content":{"rendered":"<p>A new method of making MEMS devices is on the way. Traditional MEMS devices are made by etching silicon. A new method has been developed to etch metal, called EFAB. It is a metal deposition process that can be used to make complex 3D shapes. With EFAB processing, one can make electromagnetic actuators (e.g., solenoids) or sensors based on electromagnetic transduction&#8212;applications not well served by silicon micromachining.<\/p>\n<p>Read the full article on the Sensor Mag <a HREF=\"http:\/\/www.sensorsmag.com\/articles\/1102\/14\/main.shtml\">web site<\/a>.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>A new method of making MEMS devices is on the way. Traditional MEMS devices are made by etching silicon. A new method has been developed <span class=\"ellipsis\">&hellip;<\/span> <span class=\"entry-more-link-wrapper\"><a href=\"https:\/\/www.noiseboard.com\/?p=68\" class=\"entry-more-link entry-more-link-excerpt btn btn-primary\"><span>Read More<\/span><\/a><\/span><\/p>\n","protected":false},"author":24,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[3],"tags":[],"class_list":["post-68","post","type-post","status-publish","format-standard","hentry","category-news"],"_links":{"self":[{"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=\/wp\/v2\/posts\/68","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=\/wp\/v2\/users\/24"}],"replies":[{"embeddable":true,"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=68"}],"version-history":[{"count":2,"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=\/wp\/v2\/posts\/68\/revisions"}],"predecessor-version":[{"id":2020,"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=\/wp\/v2\/posts\/68\/revisions\/2020"}],"wp:attachment":[{"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=68"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=68"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.noiseboard.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=68"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}